Handbook Of Optical Dimensional Metrology
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Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods
The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools.
Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.
Kevin Harding is a principal scientist at GE Research in Niskayuna, New York, where he leads work in optical metrology at the R&D center and provides guidance to a wide range of optical technology projects. Internationally recognized for his work in 3D measurement technology, he has received numerous honors, including the Automated Imaging Association Leadership Award and the SME Eli Whitney Productivity Award. A SPIE fellow, Harding has published over 120 technical papers, taught more than 60 short courses and tutorials, contributed sections to six books, and received over 55 patents.
Practical Optical Dimensional Metrology provides basic explanations of the operation and application of the most common methods in the field and in commercial use. The first half of the book presents a working knowledge of the mechanism and limitations of optical dimensional measurement methods that use: light level changes, two-dimensional imaging, triangulation, structured-light patterns, interference patterns, optical focus, light characteristics such as polarization, and hybrid methods with mechanical or other measurement tools. The book concludes with a series of manufacturing application examples that look at measurements from the centimeter range down to the nanometer range.
Preface 1 Introduction to Metrology1.1 Basic Terms1.2 Methods of Optical MetrologyReferences 2 Light-Intensity-based Metrology2.1 Light, Optics, and Machine Vision Technology 2.1.1 Lighting methods for machine vision 2.1.2 Optical components for machine vision2.2 Where To Use Intensity-based Methods2.3 Sources of ErrorsReferences 3 Triangulation- and Shift-based Metrology3.1 Stereo Imaging 3.1.1 Photogrammetry 3.1.2 Optical flow3.2 Active Triangulation 3.2.1 Point gages 3.2.2 Structured-line-of-light gages 3.2.3 Line triangulation gage limitations3.3 3D Phase-based Measurements 3.3.1 Phase shift analysis 3.3.2 Structured-light triangulation 3.3.3 Triangulation gage pros and cons 3.3.4 Moiré contouring 3.3.5 Interferometry (laser or white-light based) 3.3.6 Holography (including shearography and speckle methods)3.4 Summary of Triangulation and Phase Shift MethodsReferences 4 Focus-based Optical Metrology4.1 Introduction to Focus-based Methods4.2 Point-based Distance Measurement 4.2.1 Conoscopic imaging 4.2.2 Confocal imaging 4.2.3 Chromatic confocal imaging4.3 Area-based Focus Metrology Methods 4.3.1 Depth from focus 4.3.2 Structured-pattern, focus-based methods 4.3.3 Depth from defocus 4.3.4 Image focus-based method summary4.4 Focused-based Metrology SummaryReferences 5 Light-Characteristic-based Dimensional Measurements5.1 Introduction to Light Characteristics5.2 Polarization-based Dimensional Metrology 5.2.1 Ellipsometry 5.2.2 Photo-elastic methods 5.2.3 Pixelated polarization masks5.3 Light-Scatter-based Measurements 5.3.1 Light scattering pros and cons5.4 Color-based Measurements 5.4.1 Color-based measurement pros and consReferences6 Portable and Hybrid Gages6.1 Introduction to Portable and Hybrid Gages6.2 Measurement of Large Structures 6.2.1 Point trackers 6.2.2 Handheld area scanners 6.2.3 Laser radar6.3 Measurement of Mid- to Large-Size Durable Assets 6.3.1 Laser-based tracker systems 6.3.2 Robot/gantry-mounted scanners6.4 High-Precision Hybrid Systems6.5 Summary of Hybrid GagesReferences7 Finding the Right Technology for the Application7.1 Introduction7.2 Low-Precision Applications < 10 mm 7.2.1 Limitations of low-precision optical methods7.3 Large Objects and Assemblies < 1 mm 7.3.1 Limitations of large-part optical methods7.4 General Manufacturing Applications < 0.1 mm 7.4.1 Limitations of general manufacturing optical methods7.5 Precision-Manufactured Parts < 0.01 mm 7.5.1 Limitations of method for precision parts7.6 Micro-feature Metrology < 0.001 mm 7.6.1 Limitations of micro-feature metrology methods7.7 Nano-features < 0.0001 mm 7.7.1 Limitations of nano-feature metrology methods7.8 Summary of Application Comparisons8 Part Location8.1 Part Location Applications8.2 Large Parts Measured to < 10-mm resolution 8.2.1 Machine vision 8.2.2 Stereo imaging 8.2.3 Triangulation laser line 8.2.4 Phase shift 3D 8.2.5 Laser radar 8.2.6 Large-part pickup summary8.3 Composite Layup Monitoring 8.3.1 Lighting enhancement methods 8.3.2 Structured light 8.3.3 Tape layup summary8.4 Part Location Summary of OptionsReferences9 Optimized Measurement of Gaps9.1 The Application < 0.1 mm9.2 Elimination of Methods that Are Not Suitable9.3 Laser Line Triangulation9.4 3D Triangulation9.5 Chromatic Confocal Method9.6 Comparison Tests9.7 Comparison of Methods9.8 Summary of OptionsReferences10 Measurement of Small Holes10.1 The Application < 0.01 mm10.2 Laser Line Structured Light (Static)10.3 Scanning-Laser-Line or Multiple-Laser-Line Probe10.4 Phase-Shifted Structured Light10.5 Conoscopic Point Probe10.6 Confocal Point Probe10.7 Digital Optical Comparator (2D)10.8 Depth from Focus Microscopy10.9 Depth from Defocus Microscopy10.10 Summary of OptionsReferences11 Three-Dimensional Metrology for Printed Electronics11.1 The Application < 0.001 mm11.2 Laser Line Structured Light (Static)11.3 Phase-Shifted Structured Light11.4 Confocal Point Probes11.5 Depth from Focus or Defocus Microscopy11.6 Artifact-based Verification11.7 ConclusionsReferences12 Industrial Surface Finish Method Comparison for Fine Finish Measurements12.1 The Application < 0.0001 mm12.2 Interferometry12.3 Focus-based Systems12.4 Confocal Systems12.5 Scatter-based Systems12.6 Comparison of Methods12.7 Summary of OptionsReferences
PrefaceThis book is based on 40 years of working with, evaluating, testing, using, and learning about a wide range of optical dimensional metrology techniques and products. The applications have ranged from consumer products such as electronics to measuring gears and sheet metal in the automotive industry to measuring airfoils from turbine engines. Over this time, I needed to understand both what a technique can and cannot measure, as well as which applications would simply be easier or less expensive to measure by some other means. I have found that for many applications, the established theory and calculations indicate that one optical metrology method or another is suitable. However, for practical reasons of environment, measurement restrictions, or commercial availability, this method may not be a viable solution without more work or development. I have tried to capture the practical knowledge gained from hands-on experience that is useful to others who later attempt to address a similar measurement need. In many cases, the insights and diagrams were the result of a colleague coming to my office to ask how to do some measurement and the resulting discussion on a white board.
There is a lot of theory, math, and science behind the way that many of these optical measurement methods work, all of which has been well covered in the publications referenced in this book. The objective of this book is not to make the reader an expert on metrology, optics, or any of these methods, but rather to impart the practical knowledge that enables the successful use of optical metrology tools to address a measurement need in production manufacturing. I encourage those readers interested in more in-depth analysis of how these methods work to read the many excellent references cited at the end of each chapter.
This book is organized into two primary sections. The first six chapters provide basic, working explanations of how each of the optical measurement methods works. The chapters are organized according to the basic mechanisms of measurement, including light intensity changes, two-dimensional imaging, triangulation, structured-light patterns, interference patterns, optical focus, light characteristics such as polarization, and hybrid methods with mechanical or other measurement tools. The basic explanations presented do not necessarily include all of the details needed to build your own product or all of the variations in the way the method has been employed in the past, but rather represent the core operating principles of each method. With these explanations, I include some insights into the limitations as well as application mistakes to avoid.
Chapter 7 begins the second half of the book, which looks at optical metrology methods from the perspective of real applications, working from relatively course measurements on the centimeter scale down to very fine measurements on the nanometer scale. I summarize the key application assumptions for each measurement range in a table, ranking the relative capability of each optical dimensional measurement method to address these application assumptions on a practical basis based on my experience. Thus, Chapter 7 is a summary chapter to set the stage for the discussion of real-world applications. 59ce067264
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